Shenzhen Wofly Technology Co., Ltd.

Summary Centered on the core theme of “Innovation in Vacuum Coating and Surface Engineering Technologies,” the 7th Vacuum Technology Exchange Conference officially commenced today in Shenzhen. Guided by the core principle of “Breaking Technical Barriers and Fostering Industrial Synergy,” this conference features exchange sessions focused on three key topics: Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), and DLC/Ta-C Carbon-Based Coatings. Bringing together international experts from academia, industry, and research institutions alongside technical leaders from leading enterprises, the conference will delve into the latest breakthroughs in key technologies, pathways for industrial implementation, and core industry challenges. It aims to establish an integrated platform for “technical exchange, resource matching, and achievement transformation,” empowering vacuum technology to achieve deep integration and widespread application in critical sectors such as semiconductors, new energy, and advanced materials. 1. ALD/CVD “Precision Control” Solves the Puzzle Selecting valves for ALD/CVD systems requires not only meeting fundamental specifications but also aligning with process details. Achieving a breakthrough from “acceptable to premium” in vacuum coating and surface engineering hinges on “micron-level precision control” in ALD/CVD processes—where valve response speed and specialty gas system stability directly determine coating uniformity, purity, and yield rates. ALD: “Pulse Control” and “Zero Leakage” In vacuum coating processes, the performance of fluid control equipment is critical. Our products excel in response speed, leak rate, and temperature resistance. Equipment featuring a 316L EP-grade stainless steel valve body with PTFE seals achieves a leak rate ≤1×10⁻¹² Pa·m³/s, meeting ALD process requirements. Our multi-orifice valves, designed for high-temperature ALD coating applications, withstand elevated temperatures while optimizing purge efficiency to minimize residual precursor effects on coating quality. CVD: “Corrosion Resistance” and “Flow Stability” Our valve bodies are constructed from corrosion-resistant valve assemblies containing over 25% chromium-nickel-molybdenum alloy. The CVD process ensures continuous, long-term operation without corrosion or leakage. Regarding flow control, its multi-valve interlocking control system maintains flow deviation within ±0.2%, significantly outperforming the industry average precision standard of ±0.3%. This effectively resolves the industry challenge of “flow fluctuations causing coating thickness deviation.” Special Gas Piping “Three Properties” The “cleanliness, stability, and traceability” of specialty gas pipelines serve as the invisible safeguard for vacuum coating processes. Pipeline Cleanliness The cleanliness of pipeline inner walls must be strictly controlled. To this end, we have established a comprehensive cleanliness management system encompassing “cleaning, welding, purging, and inspection.” By employing a process combining “ultrasonic cleaning + high-purity nitrogen purging + passivation treatment,” the Ra value of pipeline inner walls consistently achieves 0.35μm. Precise matching according to pressure rating Pipeline pressures vary significantly across different vacuum coating scenarios (ALD typically ranges from 10⁻³ to 10⁻⁵ Pa, while CVD commonly operates at 0.1 to 0.5 MPa), necessitating connection methods compatible with the pressure rating. · Low pressure (≤0.3 MPa): Double ferrule connections · High pressure (≥0.5 MPa): Automatic TIG welding · Ultra-high vacuum (≤1e-4 Pa): Metal-sealed flanges Pressure Dynamic Equilibrium Pulsed gas supply in the ALD process causes pipeline pressure fluctuations. If fluctuations exceed ±0.02 MPa, precursor concentration stability is compromised. By adjusting the upstream pressure regulator, we controlled inlet pressure fluctuations to ±0.005 MPa. Combined with real-time feedback regulation from a high-precision pressure sensor with ±0.1% FS accuracy, we ultimately achieved pipeline pressure fluctuations ≤±0.003 MPa, ensuring consistent ALD pulse jet concentration. Core Upgrade Directions for Special Gas Equipment Special gas equipment must transition from “isolated operation” to “deep integration with the process.” Gas Mixing Equipment: Multi-Component Precision Blending CVD processes typically require 2-4 gases mixed in fixed proportions. Therefore, we employ internationally leading high-precision mass flow controllers (MFCs) with measurement accuracy of ±0.05% FS, ensuring exceptional stability and reliability in fluid flow control. Equipped with our proprietary mixing algorithm, these controllers continuously monitor and compensate for the effects of gas temperature and pressure fluctuations on flow parameters. Exhaust Gas Treatment Equipment: Meets Both Environmental and Safety Standards The exhaust gas generated by the CVD process must meet emission standards. We employ an integrated exhaust gas treatment system. Dry Adsorption Stage: Equipped with highly selective specialized adsorbents, this multi-stage adsorption system achieves ultra-high adsorption efficiency of ≥99.9%. Incineration Stage: For complex, hard-to-degrade organic compounds, a high-temperature pyrolysis environment is created. Combined with turbulent combustion enhancement technology, this achieves a deep decomposition rate of ≥99.99%, completely eliminating the risk of organic pollutants. Integrated “Special Gas Cabinet + Piping + Equipment” System To minimize interface points and reduce leakage risks, we offer an integrated solution. From specialty gas cabinet design (including purification, distribution, and safety controls) to pipeline welding and exhaust gas treatment equipment integration, the entire process is professionally executed by a single team. Leveraging the Association as a Bridge to Advance Industry Technology This conference on “Innovation in Vacuum Coating and Surface Engineering Technology” serves not only as a platform for industry-wide technological exchange but also exemplifies Wofei Technology's commitment to deepening industry connections and advancing “technology-empowered manufacturing.” Moving forward, we will continue leveraging the Vacuum Technology Industry Association as a bridge, focusing on fluid control requirements for core processes like ALD/CVD. We aim to drive the implementation of more technological innovations, propelling vacuum coating and surface engineering technology toward a new era of higher precision and enhanced safety!  

As an indispensable part of fluid control systems, the importance of gas valves is self-evident. Whether in the chemical industry, petroleum, natural gas transportation, or in the environmental protection, pharmaceutical, food and other fields, gas valves play a crucial role. They are responsible for controlling parameters such as gas flow, pressure, and flow rate, ensuring the safe and efficient operation of the system. Below, we will delve into the characteristics of gas valves. High Sealing Performance: Precise Control from Material to Structure Gas valves have extremely high requirements for sealing performance. Due to the small molecular spacing and strong diffusion ability of gas, any leakage will not only cause a waste of resources but also may have a serious impact on the environment and safety. Therefore, gas valves usually adopt a precise sealing structure and high-quality sealing materials to ensure that the valve can completely isolate the gas and prevent leakage when closed.   Excellent Corrosion Resistance: Solutions for Corrosive Environments in Multiple Scenarios The gas media that gas valves come into contact with are often corrosive, such as hydrogen sulfide and sulfur dioxide. These corrosive gases place higher demands on the materials of the valves. Gas valves are usually made of corrosion-resistant materials such as stainless steel and alloy steel to ensure that the valves can still maintain good performance under harsh working conditions.   Flexible Operation and Quick Opening/Closing: Efficiency Revolution Driven by Intelligence Gas valves require flexible operation and quick opening/closing to meet the system's demand for rapid adjustment of gas flow, pressure and other parameters. For this reason, gas valves are usually made of lightweight materials to reduce the weight of the valve and the operating torque. At the same time, the valve is also equipped with an efficient transmission mechanism and actuator to ensure that the valve can quickly and accurately respond to control signals. Safety and Reliability: Systematic Design from Passive Protection to Active Early Warning The safety and reliability of gas valves are directly related to the safe and stable operation of the entire system. Therefore, in the design and manufacturing process of gas valves, relevant standards and specifications are strictly followed to ensure the quality and performance of the valves. The valve is equipped with a variety of safety protection devices, such as overpressure protection and over-temperature protection, to deal with possible abnormal situations. In addition, gas valves have also undergone strict testing and experiments to ensure that they can operate safely and stably under various working conditions. Strong Adaptability: Customization Capability for Full Working Condition Coverage Gas valves have strong adaptability and can meet the requirements of different media, different pressures and different temperatures. Whether it is high-pressure gas, flammable and explosive gas or corrosive gas, gas valves can provide reliable solutions. In addition, gas valves can also be customized according to the actual needs of users to meet their personalized needs. High Level of Intelligence and Automation: Leap from Single-Point Control to System Collaboration With the continuous development of science and technology, gas valves are also developing towards intelligence and automation. Modern gas valves are usually equipped with intelligent control systems and sensors, which can monitor the operating status of the valve and gas parameters in real time, and make automatic adjustments according to preset programs. This intelligent and automated control method greatly improves the operating efficiency and safety of the system, and reduces errors and delays caused by manual operations.

✅ Ultra-Durable: 316 stainless steel resists corrosion and extreme temperatures (-200°C to 800°C), 3x longer lifespan ✅ Precision Accuracy: ±1% opening pressure tolerance, zero false triggers ✅ Dual-Thread Design: 1/2" male NPT (inlet) + 1/2" female NPT (outlet) for seamless pipeline integration ✅ Wide Compatibility: 4 pressure ranges for compressors/O&G pipelines/chemical/energy systems Features 1 The discharge valve opens when the system pressure exceeds the set pressure, allowing the medium to flow out to release the system pressure, and the discharge valve closes when the system pressure drops to the resealing pressure 2 Compact design, integrated valve body 3 The standard seat material is FKM 4 Operating temperature: -23°C~148°C (-10F~300°F) 5 Opening pressure: 25~500 PSIG (1.7~34.5bar) 6 Oxygen ambient application options available 7 The opening pressure is set at the factory   Applications R series relief valves are proportional relief valves that open gradually as the pressure increases. Consequently, they do not have a capacity rating at a given pressure rise (accumulation), and they are not certified to ASME or any other codes.   Some system applications require relief valves to meet specific safety codes. The system designer and user must determine when such codes apply and whether these relief valves conform to them.   AFKlok proportional relief valves should never be used as ASME Boiler and Pressure Vessel Code safety relief devices.   AFKlok proportional relief valves are not “Safety Accessories” as defined in the Pressure Equipment Directive 2014/68/EU.

This article mainly introduces BA and EP stainless steel pipes. BA (Bright Annealing) and EP (Electrolytic Polishing) are two main surface treatment methods for stainless steel pipes, and their main differences lie in treatment processes, surface finish, corrosion resistance, and application scenarios. 1.Differences in process and Principle BA(Bright Annealing): Bright surface effect is formed on the surface of stainless steel pipes through high-temperature annealing under argon atmosphere protection, with the surface showing a matte finish. EP(Electropolishing): Microscopic protrusions on the surface are removed via anodic dissolution to achieve a mirror-like finish, which significantly enhances corrosion resistance and reduces roughness. BA                                                                            EP     2. Smoothness The surface roughness of BA grade is usually ≤ 0.45 μm, showing a uniform matte finish. The Ra value of EP grade is ≤ 0.15μm, which is close to a mirror-like finish and more suitable for high-purity requirements. 3. Corrosion Resistance EP offers superior corrosion resistance compared to BA, as it removes surface defects and the oxide layer.   4. Application Scenarios BA Tubes: Suitable for applications with moderate purity requirements, such as standard high-purity gas delivery systems and biopharmaceutical equipment. EP Tubes: Used in extreme cleanliness environments, including the semiconductor industry, ultra-high-purity media delivery (e.g., electronic-grade chemicals), and sterile medical devices.