Composite Positive Pressure Explosion-Proof Gas Cabinet Silane & Ethylene Explosion-Proof Gas Cabinet

Product Overview

Afklok custom composite positive pressure cabinet integrates three core explosion-proof technologies: positive pressure protection, intrinsically safe circuit and flameproof enclosure. It is a comprehensive explosion-proof gas supply system specially developed for flammable & hazardous process gases.
With advanced compact structure, intuitive visual operation and full-automatic safety interlock functions, this cabinet fully complies with strict explosion-proof standards for semiconductor and chemical industries. It is applicable to locations with IIA~IIC grade, T1~T4 explosive gas mixtures (Zone 1, Zone 2), as well as combustible dust hazardous areas (Zone 21, Zone 22). Designed for safe delivery & control of pyrophoric, flammable and asphyxiating specialty gases such as silane, ethylene and nitrogen.

High-Purity Custom Gas Circuit, Compliant With Semiconductor Process Standards
Internal gas circuit adopts BA/EP grade 316L stainless steel high-purity pipeline, supporting independent gas circuit management for SiH4 silane, C2H4 ethylene, N2 nitrogen. Matched with precision pressure regulators, diaphragm valves, pressure gauges and nitrogen vacuum purge loop. The transparent observation window allows real-time visual inspection of pipeline operation status, convenient for daily inspection, leakage test and gas switching operation.
The internal gas loop is constructed with BA/EP grade 316L stainless steel high-purity tubing meeting semiconductor industry standards, supporting independent control of multiple process gases including SiH4 silane, C2H4 ethylene and N2 nitrogen. Matching accessories include precision pressure regulators, high-purity diaphragm valves, pressure gauges and nitrogen vacuum purge loops. The front transparent viewing window enables real-time visual inspection of pipeline status, facilitating daily patrol, leakage testing and gas switching operations. Zero contamination ensures stable ultra-high-purity process gas delivery.

Fully Customized Solutions, Wide Coverage Of Industrial Production Scenarios
We support full customization according to customer process demands: adjustable gas channel quantity, gas type, cabinet size, explosion-proof grade and signal output function. The cabinet can connect with factory central control system to realize remote alarm and emergency cut-off. Widely applied in semiconductor wafer fabrication, photovoltaic cell production, LCD/OLED display, fine chemical, new material laboratory and lithium battery manufacturing hazardous workshops.
Full customization service is available based on your production line requirements: adjustable gas circuit quantity, compatible gas types, cabinet dimensions, explosion-proof grades and remote signal output functions. The cabinet can link to factory central control systems to support remote alarm and emergency gas cut-off. It is widely deployed in hazardous areas including semiconductor wafer fabs, PV cell production lines, LCD/OLED panel workshops, specialty gas distribution rooms for fine chemical plants, high-risk laboratories for new material research, and lithium battery manufacturing facilities.

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