Product Details
Place of Origin: China
Brand Name: AFK
Certification: CE
Model Number: WFS-100F
Payment & Shipping Terms
Minimum Order Quantity: 1
Price: Negotiable
Packaging Details: Special packaging
Payment Terms: L/C, D/A, D/P, T/T, Western Union, MoneyGram
Supply Ability: 100
Temperature Of Media: |
Normal Temperature |
Port Size: |
4" |
Product Name: |
Adsorption Tail Gas Treatment Equipment |
Applicable Environment: |
Semiconductor, Liquid Crystal, |
Application: |
Semiconductor, Liquid Crystal, |
Media: |
Gas |
Temperature Of Media: |
Normal Temperature |
Port Size: |
4" |
Product Name: |
Adsorption Tail Gas Treatment Equipment |
Applicable Environment: |
Semiconductor, Liquid Crystal, |
Application: |
Semiconductor, Liquid Crystal, |
Media: |
Gas |
WFS-100F Adsorption Tail Gas Treatment Equipment
The types of gases that can be treated by the scrubber tail gas treatment device include electronic gases used in the etching process and chemical vapor deposition process in semiconductor, liquid crystal and solar industries, mainly including SiH4, SiH2Cl2, PH3, B2H6, TEOS, H2, Co, NF3, SF6, C2F6, wf6, NH3, N2O, etc
Product parameters
| 1 | Machine Model | WFS-100F |
| 2 | Scrubbing Type(Type of gas treatment principle) | Chemical adsorption |
| 3 | Capacity(Maximum gas processing flow) | 17CMM(1000CMH) |
| 4 | Dimension(mm)Machine size | 800(L)*800(W)*1200(H) |
| 5 | power | 1Ψ,220V 50/60HZ 20A |
| 6 | System inlet | ISO-100(4” tube) |
| 7 | System outlet | ISO-100(4” tube) |
| 8 | Vent(Dimension of exhaust port of machine cavity) | 4” tube,100CFM |
Type of gas to be treated
| product | Gas type | |
| Acid gas | AC-series | BF3,HF,F2,WF+,SiF4.ect |
| Hydride or metal containing gas | HM-series | PH3,AsH3,GeF4,B2H6,ect |
| Halogenated gas | BA-series | NH3,Na(OH),ect |
| Nitride gas | NT-series | NH3,TDMAT,HCW,N2O,NO,NO2,Nox,ect |
| Organic gas | OC-series | SiH4,DCS,TCS,TEOS,DEZ,PGMEA,ect |
| Sulfide gas | SL-series | H2S,H2Se,SO2,ect |
Project Case
Advantages of laboratory air supply system
1. Maintain gas purity
2. Uninterrupted gas supply: the system can switch between gas cylinders manually and automatically to ensure continuous gas supply
3. Low pressure warning: when the air pressure is lower than the alarm limit, the alarm device can automatically start the alarm
4. Stable gas pressure: the system uses two-stage decompression to supply gas, which can obtain very stable pressure
5. High efficiency: through the gas supply control system, the gas in the gas cylinder can be fully used to reduce the gas storage margin and reduce the gas consumption cost
6. Easy operation: all gas cylinders are stored in the same location, reducing the operation of handling and installation, and saving time and cost
The following is the project diagram of the laboratory gas supply installation
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FAQ
1. who are we?
We are based in Guangdong, China, start from 2011,sell to Southeast Asia(20.00%),Africa(20.00%),Eastern Asia(10.00%),Mid East(10.00%),Domestic Market(5.00%),South Asia(5.00%),Northern Europe(5.00%),Central America(5.00%),Western Europe(5.00%),South America(5.00%),Eastern Europe(5.00%),North America(5.00%). There are total about 51-100 people in our office.
2. how can we guarantee quality?
Always a pre-production sample before mass production;
Always final Inspection before shipment;
3.what can you buy from us?
pressure regulator,Tube fittings,solenoid valve,Needle valve,check valve
4. why should you buy from us not from other suppliers?
We have a couple of years with professional engineers and dedicated technicians.can provide security products for you
5. what services can we provide?
Accepted Delivery Terms: FOB,CIF,EXW；
Accepted Payment Currency:USD,CNY;
Accepted Payment Type: T/T,L/C,Western Union;
Language Spoken:English,Chinese
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