Products

Home /

Products

Leading Chinese manufacturer of VCR UHP pneumatic diaphragm valves for semiconductor, lab and pharmaceutical gas systems. Factory direct price, sample available, custom options supported

Product Details

Place of Origin: Chain

Brand Name: AFKLOK

Certification: CE

Payment & Shipping Terms

Minimum Order Quantity: 1

Price: Negotiable

Packaging Details: Specialized carton packaging

Delivery Time: 7~10 day

Payment Terms: L/C, D/A, D/P, T/T, Western Union, MoneyGram

Supply Ability: 5000

Get Best Price

Contact Now

Specifications

Description

Specifications

Highlight: 
                                                                              VCR UHP pneumatic diaphragm valves, semiconductor gas system valves, pharmaceutical lab pneumatic valves
                                                  

Description

Leading Chinese manufacturer of VCR UHP pneumatic diaphragm valves for semiconductor, lab and pharmaceutical gas systems. Factory direct price, sample available, custom options supported

Ultra High Purity VCR Pneumatic Diaphragm Valve for UHP Gas Delivery Systems

Our ultra high purity VCR pneumatic diaphragm valve is engineered for critical ultra-high purity (UHP) gas delivery applications, delivering reliable on/off control for semiconductor manufacturing, specialty gas cabinets, and laboratory gas systems. Constructed from 316L VIM-VAR vacuum-melted stainless steel with an electropolished flow path, this valve minimizes particle generation and gas adsorption, ensuring zero contamination for sensitive process gases. All units undergo 100% helium leak testing before delivery, providing stable performance for 24/7 continuous production lines.

Leading Chinese manufacturer of VCR UHP pneumatic diaphragm valves for semiconductor, lab and pharmaceutical gas systems. Factory direct price, sample available, custom options supported

Category	Parameters
Valve Type	Pneumatic Actuated Diaphragm Valve (NC/NO Optional)
Connection Type	Standard VCR Face Seal, 1/4", 3/8", 1/2" available
Body Material	316L VIM-VAR Vacuum Melted Stainless Steel
Diaphragm Material	Cobalt-based Super Alloy + PCTFE Soft Seat
Wetted Surface Finish	Electropolished, Ra ≤ 0.25μm (Ra ≤ 0.13μm customizable)
Actuation Pressure	0.4 ~ 0.6 MPa (58 ~ 87 psig)
Operating Pressure Range	Vacuum ~ 150 psig (10 bar)
Operating Temperature	-10°C ~ +80°C (high temp version up to 200°C optional)
Helium Leak Rate	≤ 1×10⁻⁹ mbar·L/s (external leakage)
Rated Cycle Life	≥ 1,000,000 on/off cycles
Cv Value Range	0.2 ~ 0.7 (varies by port size)
Compliance	RoHS, SEMI UHP Gas Standard Compatible

Leading Chinese manufacturer of VCR UHP pneumatic diaphragm valves for semiconductor, lab and pharmaceutical gas systems. Factory direct price, sample available, custom options supported

Ultra-High Purity Flow Path with Zero Dead Space

The flow path adopts a zero dead space design to eliminate gas residue and particle entrapment, fully meeting the cleanliness requirements of semiconductor front-end processes. All wetted surfaces are precision electropolished to reduce gas adsorption and particle precipitation, effectively avoiding contamination of wafers and process products. Core assembly is completed in a Class 100 clean workshop, and each valve is purged with high-purity nitrogen and vacuum-sealed before delivery to ensure cleanliness upon installation.

Ultimate Sealing Performance for Hazardous Gases

The metal diaphragm structure completely isolates the process medium from the pneumatic actuator, fundamentally eliminating stem leakage risks. Matched with VCR metal gasket face seal connections and precision lapped sealing surfaces, the valve achieves an ultra-low external leak rate of ≤ 1×10⁻⁹ mbar·L/s verified by helium mass spectrometer testing. It is suitable for silane, phosphine, HCl, HF and other toxic, corrosive and flammable specialty gases, ensuring maximum safety for production lines and operators.

Long Service Life & Low Maintenance

The diaphragm is made of high-strength cobalt-based super alloy, with optimized stress distribution design to resist fatigue under frequent on-off operations. The wear-free pneumatic actuator supports long-term maintenance-free operation, making it ideal for round-the-clock continuous production scenarios. The modular structure allows on-site diaphragm replacement, greatly reducing downtime and maintenance costs compared with integrated valve solutions.

Precise & Stable Flow Control

With a stable Cv value design, the UHP pneumatic diaphragm valve delivers consistent flow control accuracy, perfectly matching the process requirements of thin film deposition, etching, diffusion and other semiconductor manufacturing processes. Strict SPC process control is implemented throughout production, and each valve undergoes full inspection of pressure resistance, sealing and action performance before delivery to ensure batch consistency and long-term operating stability.

Industry Applications

Our VCR UHP pneumatic diaphragm valves are widely used in high-demand industries where gas purity and leakage safety are critical:

Semiconductor Wafer Manufacturing: Etching, ALD, CVD, diffusion and cleaning process gas lines
Specialty Gas Systems: Gas cabinets, VMB (Valve Manifold Box) and VMP gas distribution panels
Photovoltaic & Display: PECVD processes for solar cells and OLED flat panel production
Laboratory R&D: University and institutional high-purity gas delivery systems

Compatible media includes high-purity inert gases (Ar, He, N₂), process specialty gases, corrosive gases, and vacuum operating conditions.

Quality Control & Testing Assurance

We maintain strict quality control at every production stage to ensure each UHP diaphragm valve meets consistent high performance:

100% Helium Leak Testing: Every valve is tested by helium mass spectrometer before delivery, with individual test reports traceable by unique serial number.
Full Material Traceability: Raw material furnace batch numbers and composition test reports are retained for each valve, supporting full supply chain audit.
Clean Assembly & Packaging: Final assembly, cleaning and packaging are completed in a dust-free workshop, with nitrogen-filled sealed packaging to prevent secondary pollution.
Full Performance Inspection: Dimension inspection, pressure resistance test and action performance test are implemented for every unit to ensure 100% qualification rate.

Leading Chinese manufacturer of VCR UHP pneumatic diaphragm valves for semiconductor, lab and pharmaceutical gas systems. Factory direct price, sample available, custom options supported

FAQ

Q: Can this UHP pneumatic diaphragm valve replace Swagelok or Fujikin equivalent models?

A: Yes. Our VCR pneumatic diaphragm valve matches standard industry connection dimensions, performance parameters and mounting hole positions, serving as a cost-effective direct replacement for premium imported equivalents. Contact us for the full compatibility model list.

Q: What is the lead time for sample and bulk orders?

A: Standard sample orders ship within 3 working days. Bulk production takes 7-15 working days, and expedited production is available for urgent orders. We will confirm the exact delivery date before order placement.

Q: Do you support sample orders for testing?

A: Yes, we support 1-piece sample orders for performance testing and installation verification. Sample fees can be deducted from subsequent bulk orders.

Q: What warranty do you provide for this product?

A: We provide a 12-month warranty for all UHP pneumatic diaphragm valves, covering material and manufacturing defects under normal use. We also provide lifelong technical support and spare parts supply.

Tags:

Please send us your request and we will reply to you as soon as possible.

Send

Stainless Steel Pressure Regulator

Back Pressure Regulating Valve

Changeover Manifold

Brass Pressure Regulator

Stainless Steel Tube Fittings

Air Compressor Check Valve

Stainless Steel Ball Valve

Water Solenoid Valve

Stainless Steel Needle Valve

Gas Solenoid Valve

Stainless Steel Diaphragm Valve

Gas Flow Meter

Flexible Hose Tubing

Pneumatic Pressure Control Valve

Gas Pressure Test Gauge

Medical Oxygen Regulator

Leading Chinese manufacturer of VCR UHP pneumatic diaphragm valves for semiconductor, lab and pharmaceutical gas systems. Factory direct price, sample available, custom options supported

VCR UHP pneumatic diaphragm valves

semiconductor gas system valves

pharmaceutical lab pneumatic valves

Ultra-High Purity Flow Path with Zero Dead Space

Ultimate Sealing Performance for Hazardous Gases

Long Service Life & Low Maintenance

Precise & Stable Flow Control

Industry Applications

Quality Control & Testing Assurance

FAQ

Q: Can this UHP pneumatic diaphragm valve replace Swagelok or Fujikin equivalent models?

Q: What is the lead time for sample and bulk orders?

Q: Do you support sample orders for testing?

Q: What warranty do you provide for this product?

flow control valve,

gas cylinder regulator,